Quartz Vacuum Chamber

Equipment Introduction:

Overall Structure: The complete set of equipment consists of an electric furnace shell, furnace lining, furnace bottom plate, heating elements, heating element accessories, furnace door and opening mechanism system, and temperature control system.

Furnace Shell: Parts that come into contact with high temperatures, such as near the furnace door, are made of stainless steel. Heat dissipation protective covers are added to both sides of the furnace body to ensure that the surface temperature rise of the furnace shell is ≤45℃.

Furnace Chamber: The furnace chamber is entirely constructed using imported composite Morgan alumina fiber materials through a unique numerical control process. It has strong thermal shock resistance, resistance to rapid cooling and heating, good corrosion resistance, no collapse, no crystallization, no slagging, no pollution, and a long service life. This structure features low thermal conductivity, low heat capacity, excellent chemical stability, thermal stability, thermal shock resistance, excellent tensile strength, and corrosion resistance. The fibers can withstand temperatures up to 1500℃. After the lining is completed, a layer of high-temperature curing agent is sprayed onto the surface to form a heat insulation wall, which increases the strength and thermal radiation performance of the lining surface and further reduces heat loss, achieving rapid heating and maximizing the thermal efficiency of the furnace, resulting in good energy-saving effects. The insulation material consists of a composite insulation layer made of high-alumina fiber superhard boards, zirconia-containing high-alumina needle punched blankets, and high-alumina refractory fiber products, providing excellent insulation performance. With a fixed external size of the electric furnace, the furnace chamber volume is indirectly increased by 20%.

Furnace Accessories: Standard parts, electrical components, and wires all adopt high-quality parts and components from the imported brand Delixi.

Electrical Control System:

Basic Technical Requirements: The control system must be precise, technologically advanced, functionally complete, have strong anti-interference capabilities, stable operating conditions, and reliable performance. The control cabinet must be well-sealed, finely crafted, aesthetically pleasing, and easy to maintain.

The electrical components inside the electrical control cabinet are all fixed using a skeleton support structure, facilitating inspection and maintenance of the components within the cabinet. It also features good ventilation and heat dissipation to improve the working environment of the electrical components.

The temperature control system is equipped with PID parameter self-tuning functionality, combining expert modules and control algorithms to achieve precise temperature control and effectively suppress temperature overshoot. It includes a recording curve and a 485 communication interface for connection to a computer. The over-temperature alarm system has the functions of cutting off the main circuit, sound and light alarms, and automatic recovery and release.

In case of a thermocouple break, the control system can automatically cut off the main circuit power supply and trigger a sound and light alarm.

Configuration and Structure of the Control Cabinet: The control cabinet is divided into a temperature control unit, a recording unit, an alarm unit, a heating main circuit execution unit, and a mechanical control and safety interlock unit. To ensure the reliability of the control system and highlight its advanced technology, a comprehensive selection of well-known domestic and international brands is used to enhance cost-effectiveness. The main circuit's high-capacity circuit breakers and AC contactors are from the imported brand Delixi. All master switches, buttons, indicator lights, small-capacity circuit breakers, contactors, thermal relays, and thyristor power modules are selected for their reliability and long service life. The trigger and control system should have phase failure detection, over current detection, and alarm reporting functions.

The three-phase thyristor power module components each adopt an independent forced air-cooled heat dissipation system. The three-phase controlled thyristor power modules are connected in series with AC contactors to prevent uncontrolled heating loops formed by leakage currents in case the thyristor is accidentally punctured, which could lead to temperature runaway. The contactors also cut off the main heating power circuit in the event of thermocouple breakage or over-temperature incidents.

Main Technical Parameter:

1. furnace effective working dimension:Φ300×400mm

2. Electrical application total design power：approximate 4KW

3. Power supply：380V 50Hz

4. Stainless steel flange

5. Vacuum tube texture：quartz tube（one section closed round bottom）

6. Vacuum system：molecular pump(KYKY)

7. Vacuum degree：6.67×10^-3Pa