Model No: DKJJGGSY

Large-aperture Laser Interferometer(LLI)

1.Accurately measure the transmitted wavefront and reflected wavefront of large-aperture optical components.
2.The measurement accuracy and measurement repeatability are comparable to the American Zygo and 4D interferometer. 3.Custom design.
3.Custom design.

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Series parameters: Φ310mm Phase-shifting   Φ600mm Phase-shifting Φ800mm Phase-shifting
digital interferometer   digital interferometer   digital interferometer
Effective aperture: Φ300   Φ590 Φ790
Phase-shifting modes：   Wavelength shift Polarization phase shift Polarization phase shift
or wavelength shift or wavelength shift
Cavity index： PV ≤ λ/10，λ=632.8nm PV ≤ λ/10，λ=632.8nm PV ≤ λ/10，λ=632.8nm
Repeatability： ≤ 1nm（RMS）   ≤ 1nm（RMS） ≤ 1nm（RMS）
Standard mirror TF:Quartz TF:Quartz TF:Quartz, PV ≤ λ/12（λ=632.8nm)
material RF:Zerodur RF:Zerodur RF: Zerodur
PV ≤ λ/12，λ=632.8nm PV ≤ λ/12，λ=632.8nm   PV ≤ λ/10（λ=632.8nm）
Measurement methods：   Fizeau Fizeau Fizeau
Laser source： He-Ne Laser，λ=632.8nm   He-Ne Laser，λ=632.8nm He-Ne Laser，λ=632.8nm
Power supply： AC220V 50HZ AC220V 50HZ AC220V 50HZ
Standard accessories:   Computer and   Computer and Computer and
measurement measurement measurement
software software   software